Articles citing this article

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Cited article:

Introduction à la microélectronique sub-micronique

E. Sicard, S. Delmas-Bendhia

J3eA, 1 (2002) 002

Published online: 2002-06-15

DOI: https://doi.org/10.1051/bib-j3ea:2002002

PDF (455.1 KB)

This article has been cited by the following article(s):

Study of beveled angle effect on morphology of dual damascene via filling using ionized physical vapor deposition

Chi-Chuan Hwang, Jee-Gong Chang, Ming-Hang Weng and Hong-Chang Lin
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21 (6) 2404 (2003)
https://doi.org/10.1116/1.1623511